Polymers in lithography 1971 d j de renzo home worldcat home about worldcat help search search for library items search for lists search for contacts search for a library create lists bibliographies and reviews or search worldcat find items in libraries near you . Polymers in conventional and alternative lithography for the fabrication of nanostructures author links open overlay panel canet acikgoz a b mark a hempenius a jurriaan huskens b g julius vancso a show more. Fabrication of 2d polymer nanochannels by sidewall lithography and hot embossing e cheng helin zou zhifu yin petr jurcicek and xi zhang published 11 june 2013 o 2013 iop publishing ltd journal of micromechanics and microengineering volume 23 number 7. Photolithography with polymethyl methacrylate pmma daniel j carbaugh jason t schnabel w and sotobayashi h 1983 polymers in electron beam and x ray lithography ford c j b and pepper m 1996 crosslinked pmma as a high resolution negative resist for electron beam lithography and applications for physics of low dimensional structures
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